Electron Energy Loss Spectroscopy (EELS)
WE KNOW HOW™
Electron Energy Loss Spectroscopy (EELS) is a nanoscale analytical technique integrated with Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM) that characterizes elemental composition by measuring energy losses of incident electrons passing through samples. Compared to Energy Dispersive X-ray Spectroscopy (EDS), EELS demonstrates superior performance with enhanced signal-to-noise ratio, finer spatial resolution (achieving 1 nm), higher energy resolution (<1 eV), and greater sensitivity for low-Z elements, while additionally providing chemical bonding information for specific elements.
Optimal Applications of EELS
- Elemental Identification & Mapping
- Elemental identification (spot analysis, line scanning, 2D chemical mapping)
- Chemical fingerprinting (limited to detectable cases)
Our Strengths
- Superior signal collection compared to EDS
- Particularly effective for Si/C/O/N systems
- 1 nm probe size (vs. 1-3 nm for EDS)
- Higher energy resolution enabling chemical information
- Enhanced sensitivity for low-Z elements
Limitations
- Longer setup time
- Potential need for multiple configurations in multi-element detection
- Complex background/peak profiles
- Challenging detection of high-Z elements
EELS Technical Specifications
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- Detectable elements: B-U (Boron to Uranium)
- Detection limit: 0.5 at%
- Lateral resolution/probe size: 1 nm
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