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Inductively Coupled Plasma Mass Spectrometry (ICP-MS) is one of the most sensitive multi-element analysis techniques currently available, capable of detecting elements at concentrations ranging from milligrams to nanograms per liter. As such, it is widely recognized as one of the most critical analytical techniques across various industries, including but not limited to impurity monitoring in the semiconductor industry, environmental monitoring, geochemical analysis, mining and metallurgy, pharmaceutical analysis, and more. ICP-MS offers extremely high sensitivity (i.e., low detection limits) for most elements in the periodic table.

Solid samples are typically dissolved or digested prior to analysis. The inductively coupled plasma serves as an extremely powerful ionization source, completely breaking down the sample into its constituent elements and converting these elements into ions. These ions are then extracted and accelerated into the mass analyzer for detection. The collected ion intensities are subsequently converted into concentration units by comparison with calibration standards. This technique is particularly effective for accurate chemical analysis.

Ideal Applications of ICP-MS

• Trace and ultra-trace element analysis (ppm – ppb) of solids, liquids, surface contaminants, leachables, and extractables

• Investigative analysis (R&D, failure analysis, forensic)

• Production support

• Regulatory and compliance analysis

Our Strengths

• Most elements in the periodic table can be measured in a single analysis with high accuracy and precision

• Multiple representative sampling methods for highly sensitive detection of surface contaminants, leachables, extractables, or bulk impurities

• Suitable for a wide range of samples, from liquids to solids, inorganic to organic, and simple compositions to complex materials

• Dynamic Reaction Cell (DRC) technology virtually eliminates polyatomic isobaric interferences

• The combination of ICP-OES and ICP-MS is highly powerful, enabling the determination of element concentrations from major components to extremely low levels (often below ppb) with high accuracy and precision

Limitations

• Sample preparation – Digestion procedures for solids are often complex and time-consuming

• Polyatomic mass interferences

• Atmospheric and light halogens

ICP-MS Technical Specifications

• Detected signal: Positive ions of stable isotopes

• Solid sample requirement: 250 mg to 1 g

• Typical solution volume for sampling: 1 – 10 mL

• Elements detected: Most elements in the periodic table

• Mitigation of interference effects: Matrix separation, collision mode, reaction mode, Dynamic Reaction Cell (DRC), Kinetic Energy Discrimination (KED), triple quadrupole

• Typical detection range: Nanograms per liter

• Imaging/mapping: Not available