辉光放电质谱法

Glow Discharge Mass Spectrometry (GDMS)

Glow Discharge Mass Spectrometry (GDMS) is an analytical technique that utilizes a glow discharge source as the ion source coupled with a high-resolution mass spectrometer for elemental determination. GDMS enables direct analysis of inorganic solid samples, providing comprehensive elemental coverage from lithium to uranium (excluding carbon, nitrogen, oxygen, and hydrogen). With its high sensitivity, ease of calibration, and exceptional instrument stability, GDMS has become the gold standard for trace and ultra-trace elemental analysis in inorganic solid materials.

In addition to quantifying all elements from Li to U (excluding C, N, O, H), GDMS can also perform depth profile analysis to determine elemental concentration gradients.

Key Applications

• Full elemental analysis of high-purity materials (metals, alloys, graphite, electronic materials, oxides, ceramics, etc.)

• Depth profiling of thin films, layers, and coatings

• Compositional analysis of unknown materials (even with extremely limited sample quantities)

• Chemical characterization of powders and engineered coatings

Advantages of GDMS

✔ Comprehensive coverage: Simultaneous detection of all elements from Li to U (excluding C, N, O, H)
✔ Exceptional sensitivity: Detection limits ranging from ppb to ppm levels
✔ Minimal matrix effects
✔ Linear calibration for quantitative results
✔ High stability and reproducibility
✔ High-sensitivity depth profiling capability

Limitations

• Requires homogeneous sample distribution

• Samples must be analyzed in a stable high-vacuum chamber

Why Choose GDMS?

GDMS is the most reliable technique for trace element analysis in solids, offering unparalleled accuracy for R&D, quality control, and failure analysis in industries such as semiconductors, aerospace, and advanced materials.

Contact our experts to discuss how GDMS can address your material characterization needs.