材料表征

Different analytical methods require different material characterization services. EAG Laboratories utilizes 30 distinct material characterization techniques to provide solutions for our clients. Typically, one or more techniques are selected for a given problem based on the required information and sample form. While most common techniques are used to analyze solid samples, liquid and gas sampling can also be performed.

Applications of EAG's Material Characterization Services

• Research & Development: Fundamental research and testing of new concepts and materials

• Process Development: Evaluation of new processes, designs, and tools

• Production: Incoming material qualification, monitoring, and quality control

• Process Improvement: Tracking process changes and subsequent performance

• Failure Analysis: Investigating contamination/defect issues, identifying contamination sources, and performing good/bad comparisons

In some cases, the material of interest is already identified, but further details are needed—such as interface sharpness, depth distribution of specific elements, morphology, crystal structure, thickness, stress, and mass (among other characteristics). In other cases, the material or component of interest is unknown or poorly characterized, requiring identification and compositional analysis.

Key Areas Where Material Characterization is Essential

Thin Film Analysis

Thin film analysis encompasses various scenarios that influence technique selection:

• Thickness ranges from Ångströms (Å, 10⁻¹⁰ m) to micrometers (μm, 10⁻⁶ m) up to millimeters (mm, 10⁻³ m).

• Measurement sensitivity varies by technique, ranging from atomic percent (at%) down to parts per billion (ppb).

• Lateral analysis area can be effectively limited or highly confined.

Films can be analyzed in two primary ways:

1. Vertically (top-down or bottom-up):

   • Top-down surface analysis provides roughness, morphology, surface composition, and contamination data.

   • Subsequent sputtering reveals thickness, composition, elemental depth profiles, dopant levels, and contaminant distribution.

2. Horizontally (cross-section):

   • Reveals layer thickness, grain size, and crystallinity.

Depth Profiling

A depth profile is a plot showing concentration (y-axis) versus depth (x-axis). It can be obtained by:

• Continuous monitoring of species of interest with depth (e.g., SIMS)

• Stepwise material removal, followed by measurement (e.g., XPS or SIMS sputtering)

Key factors in selecting the optimal technique include:

• Layer thickness

• Required (or achievable) detection limits

Improper execution or interpretation can introduce artifacts and errors into depth profiles due to measurement and sample complexities. With decades of experience across diverse sample types, EAG ensures depth profiles are acquired under optimized conditions, minimizing artifacts. Accurate data interpretation is equally critical.

Crystallinity

While most characterization techniques provide elemental or molecular information, X-ray diffraction (XRD) uniquely offers insights into:

• Crystal structure & phases (polymorphs)

• Preferred orientation (texture)

• Microstructural parameters (crystallite size, % crystallinity, strain, stress, defects)

For your material characterization testing needs, contact EAG Laboratories at +86 21 68796088 or fill out our inquiry form today!